dc.contributor.author | Marsi, N | |
dc.contributor.author | Majlis, BY | |
dc.contributor.author | Hamzah, AA | |
dc.contributor.author | Mohd-Yasin, F | |
dc.date.accessioned | 2017-05-03T15:53:55Z | |
dc.date.available | 2017-05-03T15:53:55Z | |
dc.date.issued | 2014 | |
dc.date.modified | 2014-08-19T04:42:18Z | |
dc.identifier.issn | 2314-4904 | |
dc.identifier.doi | 10.1155/2014/715167 | |
dc.identifier.uri | http://hdl.handle.net/10072/62512 | |
dc.description.peerreviewed | Yes | |
dc.description.publicationstatus | Yes | |
dc.format.extent | 1149319 bytes | |
dc.format.mimetype | application/pdf | |
dc.language | English | |
dc.language.iso | eng | |
dc.publisher | Hindawi Publishing Corporation | |
dc.publisher.place | United States | |
dc.relation.ispartofstudentpublication | N | |
dc.relation.ispartofpagefrom | 715167-1 | |
dc.relation.ispartofpageto | 715167-8 | |
dc.relation.ispartofjournal | Journal of Engineering | |
dc.relation.ispartofvolume | 2014 | |
dc.rights.retention | N | |
dc.subject.fieldofresearch | Engineering | |
dc.subject.fieldofresearch | Microelectronics | |
dc.subject.fieldofresearchcode | 40 | |
dc.subject.fieldofresearchcode | 400908 | |
dc.title | The Mechanical and Electrical Effects of MEMS Capacitive Pressure Sensor Based 3C-SiC for Extreme Temperature | |
dc.type | Journal article | |
dc.type.description | C1 - Articles | |
dc.type.code | C - Journal Articles | |
dcterms.license | http://creativecommons.org/licenses/by-nc-sa/2.1/au/ | |
gro.rights.copyright | © The Author(s) 2014. The attached file is posted here with permission of the copyright owners for your personal use only. No further distribution permitted.For information about this journal please refer to the journal's website. The online version of this work is licensed under a Creative Commons License, available at http://creativecommons.org/licenses/by-nc-sa/2.1/au/ | |
gro.hasfulltext | Full Text | |
gro.griffith.author | Mohd-Yasin, Faisal | |