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dc.contributor.authorMarsi, N
dc.contributor.authorMajlis, BY
dc.contributor.authorHamzah, AA
dc.contributor.authorMohd-Yasin, F
dc.date.accessioned2017-05-03T15:53:55Z
dc.date.available2017-05-03T15:53:55Z
dc.date.issued2014
dc.date.modified2014-08-19T04:42:18Z
dc.identifier.issn2314-4904
dc.identifier.doi10.1155/2014/715167
dc.identifier.urihttp://hdl.handle.net/10072/62512
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.format.extent1149319 bytes
dc.format.mimetypeapplication/pdf
dc.languageEnglish
dc.language.isoeng
dc.publisherHindawi Publishing Corporation
dc.publisher.placeUnited States
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom715167-1
dc.relation.ispartofpageto715167-8
dc.relation.ispartofjournalJournal of Engineering
dc.relation.ispartofvolume2014
dc.rights.retentionN
dc.subject.fieldofresearchEngineering
dc.subject.fieldofresearchMicroelectronics
dc.subject.fieldofresearchcode40
dc.subject.fieldofresearchcode400908
dc.titleThe Mechanical and Electrical Effects of MEMS Capacitive Pressure Sensor Based 3C-SiC for Extreme Temperature
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
dcterms.licensehttp://creativecommons.org/licenses/by-nc-sa/2.1/au/
gro.rights.copyright© The Author(s) 2014. The attached file is posted here with permission of the copyright owners for your personal use only. No further distribution permitted.For information about this journal please refer to the journal's website. The online version of this work is licensed under a Creative Commons License, available at http://creativecommons.org/licenses/by-nc-sa/2.1/au/
gro.hasfulltextFull Text
gro.griffith.authorMohd-Yasin, Faisal


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