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  • Graphitized silicon carbide microbeams: wafer–level, self–aligned graphene on silicon wafers

    Author(s)
    Cunning, Benjamin V
    Ahmed, Mohsin
    Mishra, Neeraj
    Kermany, Atieh Ranjbar
    Wood, Barry
    Iacopi, Francesca
    Griffith University Author(s)
    Cunning, Ben V.
    Iacopi, Francesca
    Ranjbar Kermany, Atieh
    Mishra, Neeraj
    Ahmed, Mohsin
    Year published
    2014
    Metadata
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    Abstract
    Currently proven methods that are used to obtain devices with high-quality graphene on silicon wafers involve the transfer of graphene flakes from a growth substrate, resulting in fundamental limitations for large-scale device fabrication. Moreover, the complex three-dimensional structures of interest for microelectromechanical and nanoelectromechanical systems are hardly compatible with such transfer processes. Here, we introduce a methodology for obtaining thousands of microbeams, made of graphitized silicon carbide on silicon, through a site-selective and wafer-scale approach. A Ni-Cu alloy catalyst mediates a self-aligned ...
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    Currently proven methods that are used to obtain devices with high-quality graphene on silicon wafers involve the transfer of graphene flakes from a growth substrate, resulting in fundamental limitations for large-scale device fabrication. Moreover, the complex three-dimensional structures of interest for microelectromechanical and nanoelectromechanical systems are hardly compatible with such transfer processes. Here, we introduce a methodology for obtaining thousands of microbeams, made of graphitized silicon carbide on silicon, through a site-selective and wafer-scale approach. A Ni-Cu alloy catalyst mediates a self-aligned graphitization on prepatterned SiC microstructures at a temperature that is compatible with silicon technologies. The graphene nanocoating leads to a dramatically enhanced electrical conductivity, which elevates this approach to an ideal method for the replacement of conductive metal films in silicon carbide-based MEMS and NEMS devices.
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    Journal Title
    Nanotechnology
    Volume
    25
    Issue
    32
    DOI
    https://doi.org/10.1088/0957-4484/25/32/325301
    Subject
    Functional Materials
    Publication URI
    http://hdl.handle.net/10072/62752
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    • Journal articles

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