Measurement of noise characteristics of MEMS accelerometers

Mohd-Yasin, Faisal; Korman, C.E.; Nagel, D.J.

doi:10.1016/S0038-1101(02)00220-4

Author

Mohd-Yasin, Faisal

Korman, C.E.

Nagel, D.J.

Year published

2003

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Abstract

The noise characteristics of microelectromechanical systems accelerometers at different accelerations are presented. The general experimental results show 1/f-type noise at low frequencies and white Gaussian noise at high frequencies. The magnitude of the noise spectral density is acceleration dependent. The results also show spectral peaks originating from the oscillators inside the accelerometers.The noise characteristics of microelectromechanical systems accelerometers at different accelerations are presented. The general experimental results show 1/f-type noise at low frequencies and white Gaussian noise at high frequencies. The magnitude of the noise spectral density is acceleration dependent. The results also show spectral peaks originating from the oscillators inside the accelerometers.
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Journal Title

Solid State Electronics

Volume

DOI

https://doi.org/10.1016/S0038-1101(02)00220-4

Subject

Microelectronics and Integrated Circuits

Publication URI

http://hdl.handle.net/10072/62931

Collection

Journal articles