Measurement of noise characteristics of MEMS accelerometers
Author(s)
Mohd-Yasin, F
Korman, CE
Nagel, DJ
Griffith University Author(s)
Year published
2003
Metadata
Show full item recordAbstract
The noise characteristics of microelectromechanical systems accelerometers at different accelerations are presented. The general experimental results show 1/f-type noise at low frequencies and white Gaussian noise at high frequencies. The magnitude of the noise spectral density is acceleration dependent. The results also show spectral peaks originating from the oscillators inside the accelerometers.The noise characteristics of microelectromechanical systems accelerometers at different accelerations are presented. The general experimental results show 1/f-type noise at low frequencies and white Gaussian noise at high frequencies. The magnitude of the noise spectral density is acceleration dependent. The results also show spectral peaks originating from the oscillators inside the accelerometers.
View less >
View less >
Journal Title
Solid State Electronics
Volume
47
Subject
Microelectronics and Integrated Circuits
Condensed Matter Physics
Optical Physics
Electrical and Electronic Engineering