Measurement of noise characteristics of MEMS accelerometers
MetadataShow full item record
The noise characteristics of microelectromechanical systems accelerometers at different accelerations are presented. The general experimental results show 1/f-type noise at low frequencies and white Gaussian noise at high frequencies. The magnitude of the noise spectral density is acceleration dependent. The results also show spectral peaks originating from the oscillators inside the accelerometers.
Solid State Electronics
Microelectronics and Integrated Circuits