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  • Design Optimization and Finite Element Analysis of 3C-SiC Bio-Sensors based on Dogbone Resonator

    Author(s)
    Iqbal, A
    Mohd-Yasin, F
    Dimitrijev, S
    Griffith University Author(s)
    Dimitrijev, Sima
    Mohd-Yasin, Faisal
    Iqbal, Abid
    Year published
    2014
    Metadata
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    Abstract
    This paper presents the optimized design and Finite Element Analysis (FEA) of a bio sensor based on cubic silicon carbide (3C-SiC) for pathogen detection. Silicon Carbide is chosen due to its excellent material properties and chemical stability compared to silicon in varying environmental conditions. The desired resonance frequency is optimized using matlab and the finite element analysis is carried out using COMSOL and Intellisuite software's. The effect of the residual stress on the desired mode of resonant frequency and the fabrication feasibility of the proposed resonator fabrication are studied using FEA analysis. The ...
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    This paper presents the optimized design and Finite Element Analysis (FEA) of a bio sensor based on cubic silicon carbide (3C-SiC) for pathogen detection. Silicon Carbide is chosen due to its excellent material properties and chemical stability compared to silicon in varying environmental conditions. The desired resonance frequency is optimized using matlab and the finite element analysis is carried out using COMSOL and Intellisuite software's. The effect of the residual stress on the desired mode of resonant frequency and the fabrication feasibility of the proposed resonator fabrication are studied using FEA analysis. The mathematical modeling of thermally actuation and piezoresistive sensing for the design resonator bio sensors are illuminated. The close agreement between the analytical model and finite element analysis verify the design of proposed bio sensors.
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    Journal Title
    Applied Mechanics and Materials
    Volume
    595
    DOI
    https://doi.org/10.4028/www.scientific.net/AMM.595.221
    Subject
    Engineering
    Microelectronics
    Microelectromechanical systems (MEMS)
    Publication URI
    http://hdl.handle.net/10072/63696
    Collection
    • Journal articles

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