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dc.contributor.authorIqbal, A
dc.contributor.authorMohd-Yasin, F
dc.contributor.authorDimitrijev, S
dc.date.accessioned2017-05-03T15:53:57Z
dc.date.available2017-05-03T15:53:57Z
dc.date.issued2014
dc.identifier.issn1660-9336
dc.identifier.doi10.4028/www.scientific.net/AMM.595.221
dc.identifier.urihttp://hdl.handle.net/10072/63696
dc.description.abstractThis paper presents the optimized design and Finite Element Analysis (FEA) of a bio sensor based on cubic silicon carbide (3C-SiC) for pathogen detection. Silicon Carbide is chosen due to its excellent material properties and chemical stability compared to silicon in varying environmental conditions. The desired resonance frequency is optimized using matlab and the finite element analysis is carried out using COMSOL and Intellisuite software's. The effect of the residual stress on the desired mode of resonant frequency and the fabrication feasibility of the proposed resonator fabrication are studied using FEA analysis. The mathematical modeling of thermally actuation and piezoresistive sensing for the design resonator bio sensors are illuminated. The close agreement between the analytical model and finite element analysis verify the design of proposed bio sensors.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherTrans Tech Publications
dc.publisher.placeSwitzerland
dc.relation.ispartofstudentpublicationY
dc.relation.ispartofpagefrom221
dc.relation.ispartofpageto227
dc.relation.ispartofjournalApplied Mechanics and Materials
dc.relation.ispartofvolume595
dc.rights.retentionY
dc.subject.fieldofresearchEngineering
dc.subject.fieldofresearchMicroelectronics
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchcode40
dc.subject.fieldofresearchcode400908
dc.subject.fieldofresearchcode401705
dc.titleDesign Optimization and Finite Element Analysis of 3C-SiC Bio-Sensors based on Dogbone Resonator
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.facultyGriffith Sciences, School of Natural Sciences
gro.hasfulltextNo Full Text
gro.griffith.authorDimitrijev, Sima
gro.griffith.authorMohd-Yasin, Faisal


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