RF MEMS switches for smart antennas
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In this paper novel V-shaped and Z-shaped thermally actuated radio frequency (RF) MicroElectroMechanical Systems (MEMS) switches are designed and fabricated for the application of smart antennas. The switches are driven by a metal electrothermal actuator, which is able to generate large displacement and high contact force at lower temperatures. The MEMS switches utilizing the parallel beam actuator achieved 8 μm displacement. RF performances are improved by suspending the switching structures 25 μm above the substrate, thereby reducing the loss in the substrate. ON state insertion loss of −0.42 dB at 10 GHz, OFF state isolation of −40 dB at 10 GHz and return loss better than of −20 dB at 10 GHz for bidirectional Z-shaped thermally actuated RF MEMS switch are achieved on the low resistivity silicon substrate.
Copyright 2014 Springer Berlin Heidelberg. This is an electronic version of an article published in Microsystem Technologies, February 2015, Volume 21, Issue 2, pp 487–495. Microsystem Technologies is available online at: http://link.springer.com/ with the open URL of your article.
Microelectromechanical Systems (MEMS)
Microelectronics and Integrated Circuits