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  • RF MEMS switches for smart antennas

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    97095_1.pdf (694.4Kb)
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    Accepted Manuscript (AM)
    Author(s)
    Pal, Jitendra
    Zhu, Yong
    Lu, Junwei
    Dzung, Viet Dao
    Khan, Fahimullah
    Griffith University Author(s)
    Lu, Junwei
    Zhu, Yong
    Dao, Dzung V.
    Year published
    2015
    Metadata
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    Abstract
    In this paper novel V-shaped and Z-shaped thermally actuated radio frequency (RF) MicroElectroMechanical Systems (MEMS) switches are designed and fabricated for the application of smart antennas. The switches are driven by a metal electrothermal actuator, which is able to generate large displacement and high contact force at lower temperatures. The MEMS switches utilizing the parallel beam actuator achieved 8 μm displacement. RF performances are improved by suspending the switching structures 25 μm above the substrate, thereby reducing the loss in the substrate. ON state insertion loss of −0.42 dB at 10 GHz, OFF state isolation ...
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    In this paper novel V-shaped and Z-shaped thermally actuated radio frequency (RF) MicroElectroMechanical Systems (MEMS) switches are designed and fabricated for the application of smart antennas. The switches are driven by a metal electrothermal actuator, which is able to generate large displacement and high contact force at lower temperatures. The MEMS switches utilizing the parallel beam actuator achieved 8 μm displacement. RF performances are improved by suspending the switching structures 25 μm above the substrate, thereby reducing the loss in the substrate. ON state insertion loss of −0.42 dB at 10 GHz, OFF state isolation of −40 dB at 10 GHz and return loss better than of −20 dB at 10 GHz for bidirectional Z-shaped thermally actuated RF MEMS switch are achieved on the low resistivity silicon substrate.
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    Journal Title
    Microsystem Technologies
    Volume
    xx
    DOI
    https://doi.org/10.1007/s00542-014-2111-1
    Copyright Statement
    © 2014 Springer Berlin Heidelberg. This is an electronic version of an article published in Microsystem Technologies, February 2015, Volume 21, Issue 2, pp 487–495. Microsystem Technologies is available online at: http://link.springer.com/ with the open URL of your article.
    Subject
    Microelectronics
    Microelectromechanical systems (MEMS)
    Communications engineering
    Nanotechnology
    Publication URI
    http://hdl.handle.net/10072/63789
    Collection
    • Journal articles

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