Multi-axis force sensor with dynamic range up to ultrasonic
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This paper reports on the design, implementation and characterization of a multi-axis force sensor that has a dynamic frequency range up to more than 1.2 MHz. The multilayer structure of elastomer/thin polymer/viscous liquid is utilized to conduct forces as well as acoustic vibrations to sensing piezoresistive cantilevers. Experimental results showed that this sensor is capable of measuring normal and lateral forces with high linearity in the range of 40 kPa. Moreover, by evaluating the dynamic response, this sensor is proved to have a dynamic range covered ultrasonic frequencies with the first resonant frequency at 170 kHz.
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Microelectronics and Integrated Circuits