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dc.contributor.authorMarsi, Noraini
dc.contributor.authorMajlis, Burhanuddin Yeop
dc.contributor.authorHamzah, Azrul Azlan
dc.contributor.authorAbidin, Ummikalsom
dc.contributor.authorMohd-Yasin, Faisal
dc.contributor.editorBadariah Bais
dc.date.accessioned2017-05-03T15:53:57Z
dc.date.available2017-05-03T15:53:57Z
dc.date.issued2014
dc.identifier.isbn9781479957606
dc.identifier.refurihttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&tp=&arnumber=6920793&searchWithin%3Dp_Authors%3A.QT.Mohd-Yasin%2C+Faisal.QT.
dc.identifier.doi10.1109/SMELEC.2014.6920793
dc.identifier.urihttp://hdl.handle.net/10072/65341
dc.description.abstractIn this paper, we present development of MEMS capacitive pressure sensor based silicon carbide (3C-SiC) materials. The sensor is made up of four elements: a 3C-SiC diaphragm, silicon substrate, a reliable stainless steel (SS) o-ring and (SS) vacuum clamper as the package. The designed are inherent simplicity and ruggedness of this physical configuration that acceptably performed for extreme environment applications such as in gas turbine engine. This study reported a reliability testing of a prototype package MEMS capacitive pressure sensor verified up to 500 àthrough high temperature lab testing. At 500 ì the reliability test results show that the sensitivity of 0.826 pF/MPa is achieved. Experimentally, sensor nonlinearity of 0.61 % is found with hysteresis of 3.13 %. The maximum temperature coefficient of output change is 0.073 %/àmeasured at 5 MPa.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.publisherIEEE
dc.publisher.placeUnited States
dc.publisher.urihttp://ieeemalaysia-eds.org/icse2014/home.html
dc.relation.ispartofstudentpublicationY
dc.relation.ispartofconferencename11th IEEE International Conference on Semiconductor Electronics (ICSE)
dc.relation.ispartofconferencetitle2014 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS (ICSE)
dc.relation.ispartofdatefrom2014-08-27
dc.relation.ispartofdateto2014-08-29
dc.relation.ispartoflocationKuala Lumpur, MALAYSIA
dc.relation.ispartofpagefrom52
dc.relation.ispartofpageto55
dc.rights.retentionY
dc.subject.fieldofresearchMicroelectronics
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchcode400908
dc.subject.fieldofresearchcode401705
dc.titleDevelopment of a silicon carbide MEMS capacitive pressure sensor operating at 500 °C
dc.typeConference output
dc.type.descriptionE1 - Conferences
dc.type.codeE - Conference Publications
gro.hasfulltextNo Full Text
gro.griffith.authorMohd-Yasin, Faisal


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    Contains papers delivered by Griffith authors at national and international conferences.

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