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dc.contributor.authorNguyen, NT
dc.date.accessioned2014-12-20
dc.date.accessioned2017-03-02T00:00:44Z
dc.date.available2015-09-16T05:35:36Z
dc.date.available2017-03-02T00:00:44Z
dc.date.issued2014
dc.identifier.issn1876-4029
dc.identifier.urihttp://hdl.handle.net/10072/65716
dc.description.abstractMicro- and nanomachining technologies are commonly categorized into top-down and bottom-up approaches. Making nanoscale structures using top-down approach has been facing difficulties due to the limitation of optical lithography and the low throughput of electron beam and ion beam techniques. Soft lithography and hot embossing can transfer nanostructures across a large wafer. However, these techniques are limited to a soft substrate such as polymers only. A recent work by researchers from Purdue University, Harvard University, Madrid Institute for Advanced Studies, and the University of California, San Diego demonstrated a new embossing technology to create wafer-scale smooth threedimensional nanoshapes on hard crystalline metal.
dc.description.peerreviewedNo
dc.description.publicationstatusYes
dc.format.extent96994 bytes
dc.format.mimetypeapplication/pdf
dc.languageEnglish
dc.language.isoeng
dc.publisherBentham Science
dc.publisher.placeUAE
dc.publisher.urihttp://benthamscience.com/journal/index.php?journalID=mns
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom1
dc.relation.ispartofpageto2
dc.relation.ispartofissue3
dc.relation.ispartofjournalMicro and Nanosystems
dc.relation.ispartofvolume6
dc.rights.retentionY
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchNanomanufacturing
dc.subject.fieldofresearchcode401705
dc.subject.fieldofresearchcode401806
dc.titleTop-Down Nanomachining of Metals
dc.typeJournal article
dc.type.descriptionC3 - Articles (Letter/ Note)
dc.type.codec3
gro.facultyFaculty of Science, Environment, Engineering and Technology
gro.rights.copyright© 2014 Bentham Science Publishers. This is the author-manuscript version of this paper. Reproduced in accordance with the copyright policy of the publisher. Please refer to the journal website for access to the definitive, published version.
gro.date.issued2015-09-16T05:35:36Z
gro.hasfulltextFull Text
gro.griffith.authorNguyen, Nam-Trung


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