• myGriffith
    • Staff portal
    • Contact Us⌄
      • Future student enquiries 1800 677 728
      • Current student enquiries 1800 154 055
      • International enquiries +61 7 3735 6425
      • General enquiries 07 3735 7111
      • Online enquiries
      • Staff phonebook
    View Item 
    •   Home
    • Griffith Research Online
    • Conference outputs
    • View Item
    • Home
    • Griffith Research Online
    • Conference outputs
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Browse

  • All of Griffith Research Online
    • Communities & Collections
    • Authors
    • By Issue Date
    • Titles
  • This Collection
    • Authors
    • By Issue Date
    • Titles
  • Statistics

  • Most Popular Items
  • Statistics by Country
  • Most Popular Authors
  • Support

  • Contact us
  • FAQs
  • Admin login

  • Login
  • Single-crystalline 3C-SiC thin-film on large Si substrate for photonic applications

    Thumbnail
    View/Open
    99552_1.pdf (2.328Mb)
    Author(s)
    Massoubre, D
    Wang, L
    Chai, J
    Walker, G
    Hold, L
    Lobino, M
    Dimitriev, S
    Iacopi, A
    Griffith University Author(s)
    Dimitrijev, Sima
    Year published
    2014
    Metadata
    Show full item record
    Abstract
    This paper presents an unique low-temperature chemical vapor deposition process developed at Griffith University that enables the hetero-epitaxial growth of uniform single-crystalline cubic silicon carbide thin-film on very large silicon substrate. This technology, combined with the unique properties of silicon carbide, opens new opportunities for photonic applications on silicon.This paper presents an unique low-temperature chemical vapor deposition process developed at Griffith University that enables the hetero-epitaxial growth of uniform single-crystalline cubic silicon carbide thin-film on very large silicon substrate. This technology, combined with the unique properties of silicon carbide, opens new opportunities for photonic applications on silicon.
    View less >
    Conference Title
    Technical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014
    Volume
    2
    Publisher URI
    http://www.techconnectworld.com/Nanotech2014/
    https://www.nsti.org/procs/Nanotech2014v2/7/T8.173
    Copyright Statement
    © 2014 NSTI http://nsti.org. Reprinted and revised, with permission, from the Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational & Photonics (Volume 2), pp. 416-419, 15-18 Jun 2014, Washington DC, U.S.A.
    Subject
    Photonics, optoelectronics and optical communications
    Publication URI
    http://hdl.handle.net/10072/65943
    Collection
    • Conference outputs

    Footer

    Disclaimer

    • Privacy policy
    • Copyright matters
    • CRICOS Provider - 00233E
    • TEQSA: PRV12076

    Tagline

    • Gold Coast
    • Logan
    • Brisbane - Queensland, Australia
    First Peoples of Australia
    • Aboriginal
    • Torres Strait Islander