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  • Highly compressed nano-layers in epitaxial silicon carbide membranes for MEMs sensors

    Author(s)
    Brock, Ryan E
    Iacopi, Francesca
    Iacopi, Alan Victor
    Hold, Leonie Katharina
    Dauskardt, Reinhold
    Griffith University Author(s)
    Iacopi, Alan V.
    Hold, Leonie K.
    Iacopi, Francesca
    Year published
    2014
    Metadata
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    Abstract
    Through a novel methodology for evaluating layer-by-layer residual stresses in epitaxial silicon carbide films with resolution down to 10 nm, we indicate the existence of a highly compressed interfacial nano-layer between the films and their silicon substrates. This layer is consistently present underneath all types of silicon carbide films examined herein, regardless of the extent of residual tensile stress measured in the full thickness of the films, which varies from 300 MPa up to 1300 MPa. We link this nano-layer to the carbonisation step of the film growth process and we discuss in detail the implications in terms of ...
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    Through a novel methodology for evaluating layer-by-layer residual stresses in epitaxial silicon carbide films with resolution down to 10 nm, we indicate the existence of a highly compressed interfacial nano-layer between the films and their silicon substrates. This layer is consistently present underneath all types of silicon carbide films examined herein, regardless of the extent of residual tensile stress measured in the full thickness of the films, which varies from 300 MPa up to 1300 MPa. We link this nano-layer to the carbonisation step of the film growth process and we discuss in detail the implications in terms of fracture behaviour by bulge testing of micro-machined membranes.
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    Conference Title
    2014 IEEE International Interconnect Technology Conference / Advanced Metallization Conference, IITC/AMC 2014
    Publisher URI
    http://www.iitc-conference.org/
    DOI
    https://doi.org/10.1109/IITC.2014.6831885
    Subject
    Compound Semiconductors
    Publication URI
    http://hdl.handle.net/10072/66454
    Collection
    • Conference outputs

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