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dc.contributor.authorSuzuki, Takeharuen_US
dc.contributor.authorTanner, Philipen_US
dc.contributor.authorThiel, Daviden_US
dc.date.accessioned2017-05-03T11:03:37Z
dc.date.available2017-05-03T11:03:37Z
dc.date.issued2002en_US
dc.date.modified2011-04-28T07:07:28Z
dc.identifier.issn00032654en_US
dc.identifier.doi10.1039/B205085Den_AU
dc.identifier.urihttp://hdl.handle.net/10072/6672
dc.description.abstractThe effect of non-plasma and plasma treated polyimide-based humidity sensors is presented. Pure oxygen was used to etch polyimide in a plasma etcher. The sensor treated in a plasma exhibited higher sensitivity and faster response speed against moisture. The plasma treated sensor had 3.4 times the sensitivity and responded almost twice as fast as the non-plasma treated sensor. A further comparison of sensor outputs, sensitivity and response speed are presented. Chemical analysis of the polyimide surface was carried out by X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy (ATR-FTIR). XPS and ATR-FTIR showed the increase in carbonyl carbon bonds, CO, after the plasma treatment. Geometrical modification was observed by atomic force microscopy (AFM). It showed considerable surface roughness after the plasma treatment. O2 plasma treatment improved the sensitivity, and reduced the hysteresis of the sensor due to the increase in CO bonds in the polyimide.en_US
dc.description.peerreviewedYesen_US
dc.description.publicationstatusYesen_AU
dc.languageEnglishen_US
dc.language.isoen_AU
dc.publisherRoyal Society of Chemistryen_US
dc.publisher.placeUnited Kingdonen_US
dc.publisher.urihttp://www.rsc.org/publishing/journals/AN/Index.aspen_AU
dc.relation.ispartofpagefrom1342en_US
dc.relation.ispartofpageto1346en_US
dc.relation.ispartofjournalThe Analysten_US
dc.relation.ispartofvolume127en_US
dc.subject.fieldofresearchcode290902en_US
dc.subject.fieldofresearchcode290903en_US
dc.titleO2 plasma treated polyimide-based humidity sensorsen_US
dc.typeJournal articleen_US
dc.type.descriptionC1 - Peer Reviewed (HERDC)en_US
dc.type.codeC - Journal Articlesen_US
gro.facultyGriffith Sciences, Griffith School of Engineeringen_US
gro.rights.copyrightCopyright 2002 Royal Society of Chemistry. Please refer to the journal link for access to the definitive, published version.en_AU
gro.date.issued2002
gro.hasfulltextNo Full Text


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