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dc.contributor.authorZhu, H
dc.contributor.authorWang, J
dc.contributor.authorLi, WY
dc.contributor.authorLi, HZ
dc.date.accessioned2017-06-05T03:13:11Z
dc.date.available2017-06-05T03:13:11Z
dc.date.issued2014
dc.identifier.issn1022-6680
dc.identifier.doi10.4028/www.scientific.net/AMR.1017.193
dc.identifier.urihttp://hdl.handle.net/10072/67831
dc.description.abstractLasers have the potential for the micromachining of germanium (Ge). However, the thermal damages associated with the laser machining process need to be properly controlled. To minimize the thermal damages, a hybrid laser-waterjet ablation technology has recently been developed for micromachining. This paper presents an experimental study to assess the machining performances in microgrooving of Ge by using a nanosecond laser and the hybrid laser-waterjet technology. The effects of laser pulse energy, pulse overlap and focal plane position on the groove geometry and heat affected zone (HAZ) size are analyzed and discussed. It is shown that the hybrid laser-waterjet technology can give rise to narrow and deep microgrooves with minimum HAZ.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherScientific.Net
dc.publisher.placeSwitzerland
dc.relation.ispartofstudentpublicationY
dc.relation.ispartofpagefrom193
dc.relation.ispartofpageto198
dc.relation.ispartofjournalAdvanced Materials Research
dc.relation.ispartofvolume1017
dc.rights.retentionY
dc.subject.fieldofresearchEngineering
dc.subject.fieldofresearchMachining
dc.subject.fieldofresearchcode40
dc.subject.fieldofresearchcode401406
dc.titleMicrogrooving of Germanium Wafers Using Laser and Hybrid Laser-Waterjet Technologies
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
dc.description.versionAccepted Manuscript (AM)
gro.rights.copyright© 2014 Trans Tech Publications. This is the author-manuscript version of this paper. Reproduced in accordance with the copyright policy of the publisher. Please refer to the journal's website for access to the definitive, published version.
gro.hasfulltextFull Text
gro.griffith.authorLi, Huaizhong


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