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dc.contributor.authorRiaz, Kashif
dc.contributor.authorIqbal, Abid
dc.contributor.authorUmer Mian, M.
dc.contributor.authorBazaz, Shafaat
dc.date.accessioned2017-05-03T13:11:28Z
dc.date.available2017-05-03T13:11:28Z
dc.date.issued2014
dc.identifier.issn1432-1858
dc.identifier.doi10.1007/s00542-014-2377-3
dc.identifier.urihttp://hdl.handle.net/10072/68961
dc.description.abstractThe performance of micro-machined sensors is primarily determined via the sensitivity of sensing electrode to displacement. This paper presents the design, modelling, optimization and fabrication of an active gap reduction mechanism used on a conventional comb drive to enhance the capacitance in a three axes capacitive micro accelerometer. The design parameters of the active gap reduced comb drive (AGRCD) are optimized for best performance. The finite element analysis of the AGRCD is performed for design verification. The modeling and simulation results demonstrated a 534 % increase in sensitivity of the three axes capacitive micro accelerometer. The three axes capacitive micro accelerometer with AGRCD is fabricated using a commercially available standard metal-multi user MEMS processes.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherSpringer
dc.publisher.placeGermany
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom1
dc.relation.ispartofpageto12
dc.relation.ispartofjournalMicrosystem Technologies
dc.rights.retentionY
dc.subject.fieldofresearchCommunications Technologies not elsewhere classified
dc.subject.fieldofresearchNanotechnology not elsewhere classified
dc.subject.fieldofresearchCommunications Technologies
dc.subject.fieldofresearchNanotechnology
dc.subject.fieldofresearchcode100599
dc.subject.fieldofresearchcode100799
dc.subject.fieldofresearchcode1005
dc.subject.fieldofresearchcode1007
dc.titleActive gap reduction in comb drive of three axes capacitive micro accelerometer for enhancing sense capacitance and sensitivity
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.hasfulltextNo Full Text
gro.griffith.authorIqbal, Abid


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