Constrained optimum design of 3-DOF micro accelerometers
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This paper presents a technique to optimize with constraints, the performance of three-degree of freedom silicon accelerometers. A flexure configuration has been proposed in order to meet requirements of small cross-axial acceleration, high and linear sensitivity. The overall chip dimension is 1.5ױ.5װ.5 mm3 (Lחה) and the beam size is 9500ױ0 孳 (Lחה). The purpose of this constrained optimization process is to achieve the highest sensitivity or resolution while imposing conditions on other parameters. It has been done based on considerations of the junction depth, the doping concentration of the piezoresistor, the temperature, the Signal to Noise Ratio, and the power consumption. Such an optimized accelerometer offers a much better performance compared to others.
IETE Journal of Research
Copyright 2014 Taylor & Francis). This is an Accepted Manuscript of an article published by Taylor & Francis in IETE Journal of Research on 02 Oct 2014, available online: http://www.tandfonline.com/doi/abs/10.1080/03772063.2014.963171
Microelectromechanical Systems (MEMS)