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  • Constrained optimum design of 3-DOF micro accelerometers

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    104482_1.pdf (711.4Kb)
    Author(s)
    Tran, Duc-Tan
    Tue, Huu Huynh
    Roy, Sebastien
    Dzung, Viet Dao
    Griffith University Author(s)
    Dao, Dzung V.
    Year published
    2014
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    Abstract
    This paper presents a technique to optimize with constraints, the performance of three-degree of freedom silicon accelerometers. A flexure configuration has been proposed in order to meet requirements of small cross-axial acceleration, high and linear sensitivity. The overall chip dimension is 1.5ױ.5װ.5 mm3 (Lחה) and the beam size is 950׸0ױ0 孳 (Lחה). The purpose of this constrained optimization process is to achieve the highest sensitivity or resolution while imposing conditions on other parameters. It has been done based on considerations of the junction depth, the doping concentration of the piezoresistor, the temperature, ...
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    This paper presents a technique to optimize with constraints, the performance of three-degree of freedom silicon accelerometers. A flexure configuration has been proposed in order to meet requirements of small cross-axial acceleration, high and linear sensitivity. The overall chip dimension is 1.5ױ.5װ.5 mm3 (Lחה) and the beam size is 950׸0ױ0 孳 (Lחה). The purpose of this constrained optimization process is to achieve the highest sensitivity or resolution while imposing conditions on other parameters. It has been done based on considerations of the junction depth, the doping concentration of the piezoresistor, the temperature, the Signal to Noise Ratio, and the power consumption. Such an optimized accelerometer offers a much better performance compared to others.
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    Journal Title
    IETE Journal of Research
    Volume
    60
    Issue
    4
    DOI
    https://doi.org/10.1080/03772063.2014.963171
    Copyright Statement
    © 2014 Taylor & Francis). This is an Accepted Manuscript of an article published by Taylor & Francis in IETE Journal of Research on 02 Oct 2014, available online: http://www.tandfonline.com/doi/abs/10.1080/03772063.2014.963171
    Subject
    Microelectromechanical Systems (MEMS)
    Computer Software
    Publication URI
    http://hdl.handle.net/10072/69231
    Collection
    • Journal articles

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