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dc.contributor.authorTran, Duc-Tan
dc.contributor.authorTue, Huu Huynh
dc.contributor.authorRoy, Sebastien
dc.contributor.authorDzung, Viet Dao
dc.date.accessioned2017-05-16T00:38:00Z
dc.date.available2017-05-16T00:38:00Z
dc.date.issued2014
dc.identifier.issn0377-2063
dc.identifier.doi10.1080/03772063.2014.963171
dc.identifier.urihttp://hdl.handle.net/10072/69231
dc.description.abstractThis paper presents a technique to optimize with constraints, the performance of three-degree of freedom silicon accelerometers. A flexure configuration has been proposed in order to meet requirements of small cross-axial acceleration, high and linear sensitivity. The overall chip dimension is 1.5ױ.5װ.5 mm3 (Lחה) and the beam size is 950׸0ױ0 孳 (Lחה). The purpose of this constrained optimization process is to achieve the highest sensitivity or resolution while imposing conditions on other parameters. It has been done based on considerations of the junction depth, the doping concentration of the piezoresistor, the temperature, the Signal to Noise Ratio, and the power consumption. Such an optimized accelerometer offers a much better performance compared to others.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherInstitution of Electronics and Telecommunication Engineers
dc.publisher.placeIndia
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom309
dc.relation.ispartofpageto318
dc.relation.ispartofissue4
dc.relation.ispartofjournalIETE Journal of Research
dc.relation.ispartofvolume60
dc.rights.retentionY
dc.subject.fieldofresearchMicroelectromechanical Systems (MEMS)
dc.subject.fieldofresearchComputer Software
dc.subject.fieldofresearchcode091306
dc.subject.fieldofresearchcode0803
dc.titleConstrained optimum design of 3-DOF micro accelerometers
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
dc.description.versionAccepted Manuscript (AM)
gro.rights.copyright© 2014 Taylor & Francis). This is an Accepted Manuscript of an article published by Taylor & Francis in IETE Journal of Research on 02 Oct 2014, available online: http://www.tandfonline.com/doi/abs/10.1080/03772063.2014.963171
gro.hasfulltextFull Text
gro.griffith.authorDao, Dzung V.


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