Graphite-on-Paper Based Tactile Sensors Using Plastic Laminating Technique
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We report for the first time a highly sensitive paper based tactile sensor using laminated graphite drawn on paper. Thanks to the high gauge factor of 26.2, as well as its excellent robustness and humidity-resistance, plastic laminated graphite-on-paper has a high potential for mechanical sensors. Additionally, the plastic lamination combined with the laser cutting technique proposed in this study would enable the mass production of cleanroom-free fabrication and low-cost MEMS devices.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
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Microelectronics and Integrated Circuits