Modelling and fabrication of a planar thin film airflow sensor

Author(s)
Adamec, RJ
Tanner, P
Thiel, DV
Griffith University Author(s)
Year published
2001
Metadata
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Conference Title
DESIGN, CHARACTERIZATION, AND PACKAGING FOR MEMS AND MICROELECTRONICS II
Volume
4593
Subject
Communications engineering
Electronics, sensors and digital hardware
Atomic, molecular and optical physics
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Collection