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dc.contributor.convenorFranzon, Paul, D.en_AU
dc.contributor.authorAdamec, Richarden_US
dc.contributor.authorTanner, Philipen_US
dc.contributor.authorThiel, Daviden_US
dc.contributor.editorFranzon, Paul, D.en_US
dc.date.accessioned2017-05-03T11:03:15Z
dc.date.available2017-05-03T11:03:15Z
dc.date.issued2001en_US
dc.date.modified2007-03-11T22:07:32Z
dc.identifier.urihttp://hdl.handle.net/10072/9234
dc.description.publicationstatusYesen_AU
dc.languageEnglishen_US
dc.language.isoen_AU
dc.publisherThe International Society for Optical Engineeringen_US
dc.publisher.placeUSAen_US
dc.relation.ispartofconferencenameDesign, Characterization, and Packaging for MEMs and Microelectronics IIen_US
dc.relation.ispartofconferencetitleProceedings of SPIE Vol 4593en_US
dc.relation.ispartofdatefrom2001-12-17en_US
dc.relation.ispartofdateto2001-12-19en_US
dc.relation.ispartoflocationAdelaide, Sout Australiaen_US
dc.subject.fieldofresearchcode299904en_US
dc.titleModelling and fabrication of a planar thin film airflow sensoren_US
dc.typeConference outputen_US
dc.type.descriptionE2 - Conference Publications (Non HERDC Eligible)en_US
dc.type.codeE - Conference Publicationsen_US
gro.facultyGriffith Sciences, Griffith School of Engineeringen_US
gro.date.issued2001
gro.hasfulltextNo Full Text


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    Contains papers delivered by Griffith authors at national and international conferences.

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