Show simple item record

dc.contributor.authorPowell, Oliver
dc.contributor.authorSweatman, Denis
dc.contributor.authorHarrison, Barry
dc.date.accessioned2017-05-03T16:30:52Z
dc.date.available2017-05-03T16:30:52Z
dc.date.issued2000
dc.date.modified2008-08-20T01:39:30Z
dc.identifier.doi10.1109/COMMAD.2000.1022976
dc.identifier.urihttp://hdl.handle.net/10072/9351
dc.description.abstractThe effects of wet anisotropic etching of [100] silicon were studied with mask edges aligned at 45/spl deg/ to the primary wafer. Samples were etched in aqueous KOH solution with the addition of isopropyl alcohol (IPA). The addition of IPA caused a change from the formation of vertical {100} walls to sloping {110} walls only for solutions below a critical concentration and temperature. The dependence on concentration was then applied to produce a new multilayer structure with {110} walls fabricated on top of {100} walls.
dc.description.publicationstatusYes
dc.format.extent316200 bytes
dc.format.extent4 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypetext/plain
dc.languageEnglish
dc.language.isoeng
dc.publisherIEEE
dc.publisher.placeMelbourne
dc.relation.ispartofconferencenameCOMMAD 2000
dc.relation.ispartofconferencetitleConference on Optoelectonic and Microelectronic materials and devices
dc.relation.ispartofdatefrom2000-12-06
dc.relation.ispartofdateto2000-12-08
dc.relation.ispartoflocationMelbourne
dc.subject.fieldofresearchHistory and Archaeology
dc.subject.fieldofresearchcode21
dc.titleTechniques for micromachining multilayered structures in silicon
dc.typeConference output
dc.type.descriptionE2 - Conferences (Non Refereed)
dc.type.codeE - Conference Publications
gro.rights.copyright© 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
gro.date.issued2000
gro.hasfulltextFull Text
gro.griffith.authorHarrison, Barry B.
gro.griffith.authorSweatman, Denis R.
gro.griffith.authorPowell, Oliver J.


Files in this item

This item appears in the following Collection(s)

  • Conference outputs
    Contains papers delivered by Griffith authors at national and international conferences.

Show simple item record