Show simple item record

dc.contributor.authorHoang-Phuong, Phan
dc.contributor.authorDzung, Viet Dao
dc.contributor.authorNakamura, Koichi
dc.contributor.authorDimitrijev, Sima
dc.contributor.authorNam-Trung, Nguyen
dc.date.accessioned2018-09-04T01:58:43Z
dc.date.available2018-09-04T01:58:43Z
dc.date.issued2015
dc.identifier.issn1057-7157
dc.identifier.doi10.1109/JMEMS.2015.2470132
dc.identifier.urihttp://hdl.handle.net/10072/99127
dc.description.abstractSilicon carbide (SiC) is one of the most promising materials for applications in harsh environments thanks to its excellent electrical, mechanical, and chemical properties. The piezoresistive effect of SiC has recently attracted a great deal of interest for sensing devices in hostile conditions. This paper reviews the piezoresistive effect of SiC for mechanical sensors used at elevated temperatures. We present experimental results of the gauge factors obtained for various poly-types of SiC films and SiC nanowires, the related theoretical analysis, and an overview on the development of SiC piezoresistive transducers. The review also discusses the current issues and the potential applications of the piezoresistive effect in SiC.
dc.description.peerreviewedYes
dc.languageEnglish
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartofpagefrom1663
dc.relation.ispartofpageto1677
dc.relation.ispartofissue6
dc.relation.ispartofjournalIEEE Journal of Microelectromechanical Systems
dc.relation.ispartofvolume24
dc.subject.fieldofresearchMicroelectromechanical Systems (MEMS)
dc.subject.fieldofresearchElectrical and Electronic Engineering
dc.subject.fieldofresearchManufacturing Engineering
dc.subject.fieldofresearchMechanical Engineering
dc.subject.fieldofresearchcode091306
dc.subject.fieldofresearchcode0906
dc.subject.fieldofresearchcode0910
dc.subject.fieldofresearchcode0913
dc.titleThe Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
dc.description.versionAccepted Manuscript (AM)
gro.facultyGriffith Sciences, Griffith School of Engineering
gro.rights.copyright© 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
gro.hasfulltextFull Text
gro.griffith.authorDimitrijev, Sima
gro.griffith.authorDao, Dzung V.
gro.griffith.authorNguyen, Nam-Trung
gro.griffith.authorPhan, Hoang Phuong


Files in this item

This item appears in the following Collection(s)

  • Journal articles
    Contains articles published by Griffith authors in scholarly journals.

Show simple item record