Design and Implementation of Single-Layer Symmetric Micro-Transformers

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Author(s)
Khan, Fahimullah
Zhu, Yong
Lu, Junwei
Pal, Jitendra
Year published
2016
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In this paper, interleaved planar symmetric micro-transformers are implemented with single metal layer for the first time in the standard Metal-multi-user micro-electro-mechanical process (MUMP). Bonding wires are used for leading the inner terminal connections out to the outer terminal of the spiral square transformers. Two designs of micro-transformers with different dimensions are fabricated. The functionality of the devices was tested for very high frequency and ultra high frequency ranges using cascade ground signal ground probes and compared with the simulation results. The maximum efficiency of 80.65% has been achieved ...
View more >In this paper, interleaved planar symmetric micro-transformers are implemented with single metal layer for the first time in the standard Metal-multi-user micro-electro-mechanical process (MUMP). Bonding wires are used for leading the inner terminal connections out to the outer terminal of the spiral square transformers. Two designs of micro-transformers with different dimensions are fabricated. The functionality of the devices was tested for very high frequency and ultra high frequency ranges using cascade ground signal ground probes and compared with the simulation results. The maximum efficiency of 80.65% has been achieved by S1 micro-transformer design, and the maximum efficiency of S2 micro-transformer is 76.9% at 1 GHz. The total footprint of S1 and S2 designs is 1.32 and 0.37 mm2, respectively.
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View more >In this paper, interleaved planar symmetric micro-transformers are implemented with single metal layer for the first time in the standard Metal-multi-user micro-electro-mechanical process (MUMP). Bonding wires are used for leading the inner terminal connections out to the outer terminal of the spiral square transformers. Two designs of micro-transformers with different dimensions are fabricated. The functionality of the devices was tested for very high frequency and ultra high frequency ranges using cascade ground signal ground probes and compared with the simulation results. The maximum efficiency of 80.65% has been achieved by S1 micro-transformer design, and the maximum efficiency of S2 micro-transformer is 76.9% at 1 GHz. The total footprint of S1 and S2 designs is 1.32 and 0.37 mm2, respectively.
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Journal Title
IEEE Transactions on Magnetics
Volume
52
Issue
6
Copyright Statement
© 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Subject
Physical sciences
Engineering
Microelectronics
Electrical energy generation (incl. renewables, excl. photovoltaics)
Electrical energy storage
Electrical energy transmission, networks and systems