Experimental investigation of resonant MEMS switch with ac actuation
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In this letter, modeling, analysis, and experimental investigation for a resonant MEMS switch are presented. The resonant switch harnesses its mechanical resonance to lower the required actuation voltage by a substantial factor over the switch with static actuation. With alternating actuation voltage at its mechanical resonance frequency of 6.6 kHz, the average capacitance is tuned by changing the gap between fixed and movable electrodes. Based on the proposed actuation method, the device offers 57.44% lower actuation voltage compared with the switch with static actuation.
Applied Physics Letters
Copyright 2016 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in 108, 253501 (2016) and may be found at https://doi.org/10.1063/1.4954262.
Power and Energy Systems Engineering (excl. Renewable Power)
Microelectronics and Integrated Circuits
Microelectromechanical Systems (MEMS)