A Closed Device to Generate Vortex Flow Using PZT
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Dinh, TX
Phan, HT
Tran, CD
Bui, TT
Dau, VT
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Abstract
This paper reports for the first time a millimeter scale fully packaged device which generates a vortex flow of high velocity. The flow which is simply actuated by a PZT diaphragm circulates with a higher velocity after each actuating circle to form a vortex in a desired chamber. The design of such device is firstly conducted by a numerical analysis using OpenFOAM. Several numerical results are considered as the base of our experiment where a flow vortex is observed by a high speed camera. The present device is potential in various applications related to the inertial sensing, fluidic amplifier and micro/nano particle trapping and mixing.
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NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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Nanoelectromechanical systems