Comparison of Cantilever and Diaphragm Structures Employing SiC and Si Substrates for Piezoelectric-Based Energy Harvesting Application

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Kudimi, Jagan
Mohd-Yasin, Faisal
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2012
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Toulouse, France

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Proceedings of MNE 2012

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Microelectromechanical Systems (MEMS)

Microelectronics and Integrated Circuits

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