Nitridation of Silicon-Dioxide Films Grown on 6H Silicon Carbide
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Author(s)
Dimitrijev, S
Li, HF
Harrison, HB
Sweatman, D
Li, HF
Harrison, HB
Sweatman, D
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Date
1997
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62664 bytes
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IEEE Electron Device Letters
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18
Issue
5
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© 1997 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
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History, heritage and archaeology
Electronics, sensors and digital hardware