Development of new electrostatic micro cam system driven by elastic wings

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Phuc, Hong Pham
Lam, Bao Dang
Viet, Hoang Nguyen
Van, Thanh Dau
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2017
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Abstract

In this paper, we improve and develop a micro cam system, in which reciprocating linear movement of two electrostatic linear comb-drive actuators (ELCA) is transformed into the unilateral rotation of a cam rim through six elastic wings of motion-transmission mechanisms. The system was fabricated by using SOI-MEMS technology and only one photo mask. Our experimental results show that the new micro cam system runs stably while the driving frequency ranging from 1 to 30 Hz with the driving voltage Vpp = 100 V. In addition, the average angular velocities of the cam rim matched with the theoretical results better than the velocities measured in the previous micro cam system.

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Microsystem Technologies

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23

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Communications engineering

Nanotechnology

Science & Technology

Technology

Physical Sciences

Engineering, Electrical & Electronic

Nanoscience & Nanotechnology

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Phuc, HP; Lam, BD; Viet, HN; Van, TD, Development of new electrostatic micro cam system driven by elastic wings, Microsystem Technologies, 2017, 23, pp. 5669-5675

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