Enhanced Electrostatic Force Generation Capability of Angled Comb Finger Design used in Electrostatic Comb-drive Actuators

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Rosa, MA
Dimitrijev, S
Harrison, HB
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1998
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Abstract

A new comb finger design which enhances the operational performance of the commonly used electrostatic comb-drive actuator is presented. The angled comb finger design is discussed and shown experimentally to produce a greater actuating force than conventional rectangular comb fingers. Displacements up to twice as large as that achieved using rectangular comb fingers are shown for the same applied voltage.

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Electronics Letters

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34

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18

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Communications engineering

Electronics, sensors and digital hardware

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