Growth and Nitridation of Silicon-dioxide Films on Silicon-carbide

No Thumbnail Available
File version
Author(s)
Sweatman, D.
Dimitrijev, S.
Li, H. F.
Tanner, P.
Harrison, H. B.
Primary Supervisor
Other Supervisors
Editor(s)

Riley, T. J.

Gelpey, J. C.

Roozeboom, F.

Saito, S.

Date
1997
Size
File type(s)
Location

SAN FRANCISCO, CA

License
Abstract

Silicon-carbide offers great potential as a wide bandgap semiconductor for electronic applications. A good quality oxide dielectric will allow MOS device fabrication and in particular N-channel mosfets for their higher electron mobility. To date oxides on N-type silicon-carbide (nitrogen doped) have exhibited excellent characteristics while on P-type (aluminium or boron doped) the characteristics are poor. This paper presents results for the oxidation and subsequent nitridation of N and P-type silicon-carbide. It illustrates the role that nitrogen at the interface has in improving the trap densities and that nitric oxide provides the nitrogen well. Nitrous oxide, previously used to nitride silicon dioxide on silicon, is shown to substantially deteriorate the interface density of states for both N and P-type substrates.

Journal Title
Conference Title

RAPID THERMAL and INTEGRATED PROCESSING VI

Book Title
Edition
Volume

470

Issue
Thesis Type
Degree Program
School
Publisher link
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
Item Access Status
Note
Access the data
Related item(s)
Subject
Persistent link to this record
Citation