Maskless Fabrication of GaN-Based Light-Emitting Diodes

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Author(s)
Guilhabert, Benoit
Richardson, Elliot
Massoubre, David
Gu, Erdan
Watson, Ian M.
Dawson, M.D.
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2010
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246350 bytes

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Denver, US

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Abstract

A versatile maskless process flow was developed to fabricate a GaN-based individually-addressable LED array. This new fabrication approach combines CMOS-controlled micro-LED writing and silver nanoparticle inkjet printing. An array filling factor of 99% was achieved.

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2010 23RD ANNUAL MEETING OF THE IEEE PHOTONICS SOCIETY

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© 2010 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

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Photonics, Optoelectronics and Optical Communications

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