Aluminum induced in situ crystallization of amorphous SiC
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Author(s)
Wang, Li
Dimitrijev, Sima
Tanner, Philip
Zou, Jin
Dimitrijev, Sima
Tanner, Philip
Zou, Jin
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2009
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Applied Physics Letters
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94
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© 2009 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters and may be found at http://dx.doi.org/10.1063/1.3132053
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Physical sciences
Engineering
Microelectronics