Calibration of AFM cantilever spring constants

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T. Gibson, Christopher
L. Weeks, Brandon
Abell, Chris
Rayment, Trevor
Myhra, Sverre
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P. Midgley

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2003
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Abstract

In this paper we present two simple, reliable and readily applicable methods for calibrating cantilevers and measuring the thickness of thin gold films. The spring constant calibration requires knowledge of the Young's modulus, density of the cantilever and resonant frequency. The thickness of thin gold layers was determined by measuring changes in the resonant frequency and Q-factor of beam shaped AFM cantilevers before and after coating. The techniques for measuring the spring constant and thin film thickness provide accuracy on the order of 10-15%.

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Ultramicroscopy: journal devoted to the technical and theoretical advancement of structural research

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97

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© 2003 Elsevier : Reproduced in accordance with the copyright policy of the publisher : This journal is available online - use hypertext links.

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Atomic, Molecular, Nuclear, Particle and Plasma Physics

Optical Physics

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