Individually Addressable AlInGaN Micro-LED Arrays With CMOS Control and Subnanosecond Output Pulses

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McKendry, Jonathan J. D.
Rae, Bruce R.
Gong, Zheng
Muir, Keith R.
Guilhabert, Benoit
Massoubre, David
Gu, Erdan
Renshaw, David
Dawson, Martin D.
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2009
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Abstract

We report the fabrication and characterization of an ultraviolet (370 nm) emitting AlInGaN-based micro-light- emitting diode (micro-LED) array integrated with complementary metal-oxide-semiconductor control electronics. This configuration allows an 8 × 8 array of micro-LED pixels, each of 72-mum diameter, to be individually addressed. The micro-LED pixels can be driven in direct current (dc), square wave, or pulsed operation, with linear feedback shift registers (LFSRs) allowing the output of the micro-LED pixels to mimic that of an optical data transmitter. We present the optical output power versus drive current characteristics of an individual pixel, which show a micro-LED output power of up to 570 muW in dc operation. Representative optical pulse trains demonstrating the micro-LEDs driven in square wave and LFSR modes, and controlled optical pulsewidths from 300 ps to 40 ns are also presented.

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IEEE Photonics Technology Letters

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21

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12

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Photonics, Optoelectronics and Optical Communications

Optical Physics

Electrical and Electronic Engineering

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