Highly sensitive p-type 4H-SiC Van der Pauw sensor

No Thumbnail Available
File version
Author(s)
Nguyen, Tuan-Khoa
Phan, Hoang-Phuong
Han, Jisheng
Dinh, Toan
Foisal, Abu Riduan Md
Dimitrijev, Sima
Zhu, Yong
Nguyen, Nam-Trung
Dao, Dzung Viet
Primary Supervisor
Other Supervisors
Editor(s)
Date
2018
Size
File type(s)
Location
License
Abstract

This paper presents for the first time a p-type 4H silicon carbide (4H-SiC) van der Pauw strain sensor by utilizing the strain induced effect in four-terminal devices. The sensor was fabricated from a 4H-SiC (0001) wafer, using a 1 μm thick p-type epilayer with a concentration of 1018 cm−3. Taking advantage of the four-terminal configuration, the sensor can eliminate the need for resistance-to-voltage conversion which is typically required for two-terminal devices. The van der Pauw sensor also exhibits an excellent repeatability and linearity with a significantly large output voltage in induced strain ranging from 0 to 334 ppm. Various sensors aligned in different orientations were measured and a high sensitivity of 26.3 ppm−1 was obtained. Combining these performances with the excellent mechanical strength, electrical conductivity, thermal stability, and chemical inertness of 4H-SiC, the proposed sensor is promising for strain monitoring in harsh environments.

Journal Title

RSC Advances

Conference Title
Book Title
Edition
Volume

8

Issue

6

Thesis Type
Degree Program
School
Publisher link
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
Item Access Status
Note
Access the data
Related item(s)
Subject

Microelectromechanical systems (MEMS)

Physical sciences

Nanomaterials

Chemical sciences

Silicon carbide

Strain sensor

Resistance-to-voltage conversion

Two-terminal devices

Mechanical strength

Electrical conductivity

Thermal stability

Chemical inertness

Persistent link to this record
Citation
Collections