Isotropic piezoresistance of p-type 4H-SiC in (0001) plane

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Tuan-Khoa, Nguyen
Hoang-Phuong, Phan
Toan, Dinh
Toriyama, Toshiyuki
Nakamura, Koichi
Foisal, Abu Riduan Md
Nam-Trung, Nguyen
Dzung, Viet Dao
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2018
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Abstract

In this work, the isotropic piezoresistance in the (0001) plane of p-type 4H-SiC was discovered by means of the hole energy shift calculation and the coordinate transformation. These results were also confirmed by the measurement of the piezoresistance using a bending beam method. The fundamental longitudinal and transverse piezoresistive coefficients p11 and p12 were found to be 6.43 1011Pa1 and 5.12 1011Pa1 , respectively. The isotropy of the piezoresistance in the basal plane of p-type 4H-SiC is attributed to the isotropic hole energy shift under uniaxial strain. This interesting phenomenon in p-type 4H-SiC is promising for the design and fabrication of mechanical sensors and strain-engineered electronics since high sensitivity and consistent performance can be achieved regardless of the crystallographic orientation.

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Applied Physics Letters

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113

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1

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Physical sciences

Engineering

Microelectromechanical systems (MEMS)

Materials engineering

Isotropic piezoresistance

Bending beam method

Uniaxial strain

Mechanical sensors

Strain-engineered electronics

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