HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform
File version
Version of Record (VoR)
Author(s)
Oo, Swe Zin
Tarazona, Antulio
Cernansky, Robert
Reynolds, Scott A
Khokhar, Ali Z
Mittal, Vinita
Thomson, David J
Politi, Alberto
Mashanovich, Goran Z
Reed, Graham T
Chong, Harold MH
Griffith University Author(s)
Primary Supervisor
Other Supervisors
Editor(s)
Date
Size
File type(s)
Location
Abstract
We present interlayer slope waveguides, designed to guide light from one level to another in a multi-layer silicon photonics platform. The waveguide is fabricated from hydrogenated amorphous silicon (a-Si:H) film, deposited using hot-wire chemical vapor deposition (HWCVD) at a temperature of 230°C. The interlayer slope waveguide is comprises of a lower level input waveguide and an upper level output waveguide, connected by a waveguide on a slope, with vertical separation to isolate other crossing waveguides. Measured loss of 0.17 dB/slope was obtained for waveguide dimensions of 600 nm waveguide width (w) and 400 nm core thickness (h) at a wavelength of 1550 nm and for transverse electric (TE) mode polarization.
Journal Title
Optics Express
Conference Title
Book Title
Edition
Volume
27
Issue
11
Thesis Type
Degree Program
School
Publisher link
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
© 2019 The Author(s). Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License. Further distribution of this work must maintain attribution to the author(s) and the published article's title, journal citation, and DOI.
Item Access Status
Note
Access the data
Related item(s)
Subject
Atomic, molecular and optical physics
Communications engineering
Science & Technology
Physical Sciences
Optics
CHEMICAL-VAPOR-DEPOSITION
FABRICATION
Persistent link to this record
Citation
Petra, R; Oo, SZ; Tarazona, A; Cernansky, R; Reynolds, SA; Khokhar, AZ; Mittal, V; Thomson, DJ; Politi, A; Mashanovich, GZ; Reed, GT; Chong, HMH, HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform, Optics Express, 2019, 27 (11), pp. 15735-15749