Fabrication and Characterization of a PMMA Capacitive Micro accelerometer based on Thermal Imprint Method
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Author(s)
Amaya, Satoshi
Dao, Dzung Viet
Sugiyama, Susumu
Dao, Dzung Viet
Sugiyama, Susumu
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Kimata
Date
2011
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Tokyo, Japan
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Technical Digest of the 28th Sensor Symposium
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Microtechnology