Highly Sensitive Low-Frequency Acoustic Sensor Using Piezoresistive Cantilever
File version
Author(s)
Okamoto, Yuki
Takeshita, Toshihiro
Takei, Yusuke
Okada, Hironao
Khoa, Nguyen
Hoang-Phuong, Phan
Ichiki, Masaaki
Griffith University Author(s)
Primary Supervisor
Other Supervisors
Editor(s)
Date
Size
File type(s)
Location
Tokyo, Japan
License
Abstract
In this paper, we reported a MEMS-based microphone that can achieve 80 dB signal to noise ratio (SNR) or 0.1 mPa resolution over the frequency range of 2 Hz to 200 Hz. In the proposed microphone, a piezoresistive cantilever with ultra-high acoustic compliance was used as the sensing element. By realizing the ultrathin structure with large pad and narrow hinges, we were able to achieve the cantilever whose deformation to pressure is more than 200 times higher than that of the previous cantilever design. The measurement results demonstrate that the proposed microphone can measure 0.1 mPa acoustic signal with frequency down to 2 Hz. The proposed microphone is useful for measurement of low-frequency sound, which is important in various applications including photoacoustic-based gas/chemical sensing and monitoring of physiological parameters and natural disasters.
Journal Title
Conference Title
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Book Title
Edition
Volume
Issue
Thesis Type
Degree Program
School
Publisher link
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
Item Access Status
Note
Access the data
Related item(s)
Subject
Nanotechnology
Cantilever
Engineering
Engineering, Electrical & Electronic
Engineering, Mechanical
Low-frequency
Persistent link to this record
Citation
Thanh-Vinh, N; Okamoto, Y; Takeshita, T; Takei, Y; Okada, H; Khoa, N; Hoang-Phuong, P; Ichiki, M, Highly Sensitive Low-Frequency Acoustic Sensor Using Piezoresistive Cantilever, 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022, pp. 841-844