Precision transfer printing of ultra-thin AlInGaN micron-size light-emitting diodes
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Author(s)
Massoubre, David
Guilhabert, B.
Zhu, D.
Laurand, N.
Gu, E.
Watson, I.
Humphreys, C.
Dawson, M.
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IEEE
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Bellevue, WA, United States
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Abstract
We report the fabrication of a mechanically-flexible 16times16 array of thin-film, micron-size LEDs emitting at 480 nm. Devices were transfer-printed onto a mechanically-flexible ITO backplane using a modified, high-precision (placement accuracy +or-25 nm) assembly system.
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IEEE Photonics Conference (IPC 2013)
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© 2013 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
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Photonics, Optoelectronics and Optical Communications