Analysis of Fowler-Nordheim injection in NO nitrided gate oxide grown on n-type 4H-SiC

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Li, HF
Dimitrijev, S
Sweatman, D
Harrison, HB
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2000
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Fowler-Nordheim injection in NO nitrided gate oxides, grown on n-type 4H-SiC, has been investigated at room temperature and 300î The results show that NO increases the electron injection barrier height to a value which is very close to the theoretical value at room temperature. Excessive temperature dependence of the electron injection barrier height is also significantly reduced by the nitridation.

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Microelectronics Reliability

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40

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History, heritage and archaeology

Electronics, sensors and digital hardware

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