Low frequency noise measurement of three-axis surface micro- machined silicon capacitive accelerometer

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Author(s)
Mohd-Yasin, F
Nagel, DJ
Korman, CE
Ong, DS
Chuah, HT
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Ken Jones

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2007
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209920 bytes

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College Pk, MD

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Abstract

The authors performed the low frequency noise measurement (LFNM) technique to study noise characteristics of commercial accelerometers with single and dual axis. In this work, we studied the noise characteristics of a three-axis accelerometer using an improved and sensitive test setup to avoid cross-axis distortion.

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2007 INTERNATIONAL SEMICONDUCTOR DEVICE RESEARCH SYMPOSIUM, VOLS 1 AND 2

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© 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

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Electrical and Electronic Engineering not elsewhere classified

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