Regression Model for the Specific Contact Resistance of SiC Ohmic Contacts

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Nicholls, Jordan R
Dimitrijev, Sima
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2021
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Abstract

The number of variables involved in the formation of Ohmic contacts to SiC is large, and their relationships to the final contact resistance are often unclear. As such, trial-and-error methods are typically employed to develop or improve SiC contacts. In pursuit of a better alternative, we developed and tested several regression models to predict the specific contact resistance of Ni, Ti, and Al based contacts on both n- and p-type SiC. Literature data was used to train linear regression, Gaussian process regression, and neural network (NN) ensemble models; of these, the NN ensemble was the most effective at predicting contact resistances. We then applied the model to optimize the annealing schedule for Ni contacts to n-type 4H-SiC, and Ti/Al contacts to p-type 4H-SiC. Finally, we use the model to generate optimal simultaneous contact recipes.

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IEEE Transactions on Semiconductor Manufacturing

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34

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4

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Electrical engineering

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Nicholls, JR; Dimitrijev, S, Regression Model for the Specific Contact Resistance of SiC Ohmic Contacts, IEEE Transactions on Semiconductor Manufacturing, 2021, 34 (4), pp. 493-499

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