AFM-based micro/nano-scale lithography of poly(dimethylsiloxane) – stick-slip on a ‘soft’ polymer

No Thumbnail Available
File version
Author(s)
Watson, Jolanta
Myhra, Sverre
Brown, Chris
Watson, Gregory
Primary Supervisor
Other Supervisors
Editor(s)

Jung-Chih chiao, David N. Jamieson, Lorenzo Faraone, Andrew S. Dzurak

Date
2005
Size
File type(s)
Location

Sydney, Australia

License
Abstract

Silicone rubbers have steadily gained importance in industry since their introduction in the 1960's. Poly(dimethylsiloxane) (PDMS) is a relatively soft and optically clear, two-part elastomer with interesting and, more importantly, useful physical and electrical properties. Some of its common applications include protective coatings (e.g., against moisture, environmental attack, mechanical and thermal shock and vibrations), and encapsulation (e.g., amplifiers, inductive coils, connectors and circuit boards). The polymer has attracted recent interest for applications in soft lithography. The polymer is now routinely used as a patterned micro-stamp for chemical modification of surfaces, in particular Au substrates. Prominent stick-slip effects, surface relaxation and elastic recovery were found to be associated with micro/nano manipulation of the polymer by an AFM-based contact mode methodology. Those effects provide the means to explore in detail the meso-scale tip-to-surface interactions between a tip and a soft surface. The dependence of scan speed, loading force, attack angle and number of scan lines have been investigated.

Journal Title
Conference Title

Proceedings of SPIE - Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II

Book Title
Edition
Volume
Issue
Thesis Type
Degree Program
School
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
Item Access Status
Note
Access the data
Related item(s)
Subject
Persistent link to this record
Citation