Effects of nitridation in gate oxides grown on 4H-SiC
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Jamet, P
Dimitrijev, S
Tanner, P
Dimitrijev, S
Tanner, P
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2001
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Journal of Applied Physics
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90
Issue
10
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© 2001 American Institute of Physics: Reproduced in accordance with the copyright policy of the publisher: This journal is available online - use hypertext links.
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Mathematical sciences
Physical sciences
Engineering