A Micromachined 2DOF Nanopositioner with Integrated Capacitive Displacement Sensor

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Author(s)
Ji, Lujun
Zhu, Yong
Moheimani, SO Reza
Yuce, Mehmet Rasit
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Gary K. Fedder
Date
2010
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1521091 bytes
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Kona, HI
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Abstract

This paper presents the design, fabrication and characterization of a micromachined two degrees-of-freedom (2DOF) nanopositioner. The proposed micro-electro-mechanical system (MEMS) stage, consisting of comb-drive actuators and on-chip capacitive displacement sensors in both X and Y directions, can simultaneously actuate the microstage and sense the corresponding displacements. A commercial capacitive readout IC (MS3110) is used for the open-loop capacitive sensing. The first resonance frequency of the stage is measured to be 4.24 kHz. The positioner has a dynamic range from -6.27 um to +6.64 um at an actuation voltage of 100 V.

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2010 IEEE SENSORS
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© 2010 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
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Microelectromechanical systems (MEMS)
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