A Micromachined 2DOF Nanopositioner with Integrated Capacitive Displacement Sensor

Loading...
Thumbnail Image
File version
Author(s)
Ji, Lujun
Zhu, Yong
Moheimani, SO Reza
Yuce, Mehmet Rasit
Griffith University Author(s)
Primary Supervisor
Other Supervisors
Editor(s)

Gary K. Fedder

Date
2010
Size

1521091 bytes

File type(s)

application/pdf

Location

Kona, HI

License
Abstract

This paper presents the design, fabrication and characterization of a micromachined two degrees-of-freedom (2DOF) nanopositioner. The proposed micro-electro-mechanical system (MEMS) stage, consisting of comb-drive actuators and on-chip capacitive displacement sensors in both X and Y directions, can simultaneously actuate the microstage and sense the corresponding displacements. A commercial capacitive readout IC (MS3110) is used for the open-loop capacitive sensing. The first resonance frequency of the stage is measured to be 4.24 kHz. The positioner has a dynamic range from -6.27 um to +6.64 um at an actuation voltage of 100 V.

Journal Title
Conference Title

2010 IEEE SENSORS

Book Title
Edition
Volume
Issue
Thesis Type
Degree Program
School
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement

© 2010 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

Item Access Status
Note
Access the data
Related item(s)
Subject

Microelectromechanical systems (MEMS)

Persistent link to this record
Citation