High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments

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Phan, Hoang-Phuong
Dinh, Toan
Nguyen, Tuan-Khoa
Qamar, Afzaal
Nguyen, Thanh
Dau, Van Thanh
Han, Jisheng
Dao, Dzung Viet
Nguyen, Nam-Trung
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2020
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Abstract

With its unprecedented properties over conventional rigid platforms, flexible electronics have been a significant research topic in the last decade, offering a broad range of applications from bendable display, flexible solar-energy systems, to soft implantable-devices for health monitoring. Flexible electronics for harsh and hazardous environments have also been extensively investigated. In particular, devices with stretchability and bend-ability as well as tolerance to extreme and toxic operating conditions are imperative. This work presents silicon carbide grown on silicon and then transferred onto polyimide substrate as a new platform for flexible sensors for hostile environments. Combining the excellent electrical properties of SiC and high temperature tolerance of polyimide, we demonstrated for the first time a flexible SiC sensors that can work above 400 °C. This new sensing platform opens exciting opportunities toward flexible sensing applications in hazardous environments.

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Journal of Hazardous Materials

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394

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© 2020 Elsevier. Licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International Licence (http://creativecommons.org/licenses/by-nc-nd/4.0/) which permits unrestricted, non-commercial use, distribution and reproduction in any medium, providing that the work is properly cited.

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Materials engineering

Nanomaterials

Nanotechnology

Chemical sciences

Engineering

Environmental sciences

Science & Technology

Life Sciences & Biomedicine

Engineering, Environmental

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Hoang-Phuong, P; Toan, D; Tuan-Khoa, N; Qamar, A; Thanh, N; Van, TD; Han, J; Dzung, VD; Nam-Trung, N, High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments, Journal of Hazardous Materials, 2020, 394, pp. 122486

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