Characterization of ProTEX PSB Thin Film as Photosensitive Layer for MEMS Capacitive Pressure Sensor Diaphragm Based on SiC-on-Si Wafer
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Author(s)
Marsi, Noraini
Majlis, Burhanuddin Yeop
Hamzah, Azrul Azlan
Mohd-Yasin, Faisal
Majlis, Burhanuddin Yeop
Hamzah, Azrul Azlan
Mohd-Yasin, Faisal
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2013
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Bandung, Indonesia
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International Conference on Advanced Material Engineering & Technology
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Microelectromechanical Systems (MEMS)
Microelectronics and Integrated Circuits