Progress towards the creation of iron nanodots using atom lithography
No Thumbnail Available
File version
Author(s)
Palmer, AJ
Baker, M
Sang, RT
Baker, M
Sang, RT
Griffith University Author(s)
Primary Supervisor
Other Supervisors
Editor(s)
Rakic, AD
Yeow, YT
Date
2005
Size
File type(s)
Location
Univ Queensland, Brisbane, AUSTRALIA
License
Abstract
Iron structures with dimensions comparable to the minimum domain size of 5 nm may provide us with a new high-density data storage method. Several limitations have been observed in existing depositional atom lithography schemes for producing these structures. We will present an alternative scheme using metastable neon atom lithography
Journal Title
Conference Title
Commad 04: 2004 Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings