A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator
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Bui, Thanh Tung
Thien, Xuan Dinh
Dzung, Viet Dao
Yamada, Takeo
Hata, Kenji
Sugiyama, Susumu
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Abstract
This paper reports a robust fabrication process to integrate carbon nanotubes (CNTs) film into a micro electromechanical systems actuator by the design and fabrication of a silicon micromirror supported by CNTs hinges. Vertically aligned single wall carbon nanotubes forest film was synthesized by water-assisted chemical vapor deposition. CNTs film was then condensed, manually maneuvered and patterned by EB lithography to form a flexible hinge of a mirror. The mirror is actuated by a electrostatic angular vertical comb actuator and the performance had been characterized. The mirror could be driven by a low voltage with a rotate angle of 1.5? and a response frequency of 500 Hz.
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Journal of Micromechanics and Microengineering
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23
Issue
7
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Engineering
Microtechnology