A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator

No Thumbnail Available
File version
Author(s)
Van, Thanh Dau
Bui, Thanh Tung
Thien, Xuan Dinh
Dzung, Viet Dao
Yamada, Takeo
Hata, Kenji
Sugiyama, Susumu
Griffith University Author(s)
Primary Supervisor
Other Supervisors
Editor(s)
Date
2013
Size
File type(s)
Location
License
Abstract

This paper reports a robust fabrication process to integrate carbon nanotubes (CNTs) film into a micro electromechanical systems actuator by the design and fabrication of a silicon micromirror supported by CNTs hinges. Vertically aligned single wall carbon nanotubes forest film was synthesized by water-assisted chemical vapor deposition. CNTs film was then condensed, manually maneuvered and patterned by EB lithography to form a flexible hinge of a mirror. The mirror is actuated by a electrostatic angular vertical comb actuator and the performance had been characterized. The mirror could be driven by a low voltage with a rotate angle of 1.5? and a response frequency of 500 Hz.

Journal Title

Journal of Micromechanics and Microengineering

Conference Title
Book Title
Edition
Volume

23

Issue

7

Thesis Type
Degree Program
School
Publisher link
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
Item Access Status
Note
Access the data
Related item(s)
Subject

Engineering

Microtechnology

Persistent link to this record
Citation
Collections