A thin film approach for SiC-derived graphene as an on-chip electrode for supercapacitors

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Ahmed, Mohsin
Khawaja, Mohamad
Notarianni, Marco
Wang, Bei
Goding, Dayle
Gupta, Bharati
Boeckl, John J
Takshi, Arash
Motta, Nunzio
Saddow, Stephen E
Iacopi, Francesca
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2015
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Abstract

We designed a nickel-assisted process to obtain graphene with sheet resistance as low as 80 Ω square−1 from silicon carbide films on Si wafers with highly enhanced surface area. The silicon carbide film acts as both a template and source of graphitic carbon, while, simultaneously, the nickel induces porosity on the surface of the film by forming silicides during the annealing process which are subsequently removed. As stand-alone electrodes in supercapacitors, these transfer-free graphene-on-chip samples show a typical double-layer supercapacitive behaviour with gravimetric capacitance of up to 65 F g−1. This work is the first attempt to produce graphene with high surface area from silicon carbide thin films for energy storage at the wafer-level and may open numerous opportunities for on-chip integrated energy storage applications.

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Nanotechnology

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26

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43

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© 2015 Institute of Physics Publishing. This is the author-manuscript version of this paper. Reproduced in accordance with the copyright policy of the publisher.Please refer to the journal's website for access to the definitive, published version.

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Nanoelectronics

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